Digital Mass Flow Controller

 Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM

• Wide variety of communications and power supply
• High S.P. accuracy:  +/- 1.0% S.P. (*1)
• 1 second high speed responce (*1)
• Multi-gas, multi-range solution

 The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.